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CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Archive • Versions 1 Vol 3 (2) : 20030201 2020
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FinFET Performance Enhancement by Source/Drain Cavity Structure Optimization
Man Gu, Wenjun Li, Haiting Wang, Owen Huhidden
Received： 2020 - 03 - 11
Accepted： 2020 - 05 - 28
Published： 2020 - 06 - 08
3924 130 0
CSCD  ·  Baidu Scholar
References
Journal of Microelectronic Manufacturing

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