Welcome to Journal of Microelectronic Manufacturing!
Volume 4, Issue 3
  • Published: Sept. 30, 2021
  • Supervised by:None
  • Hosted by:None
  • Published by:JoMM Editorial Office

Research Article top

A Novel R2R Control Strategy with Virtual Structure Deployment and Rolling Wave Control Plan
Authors: Chang Xu
Institution:Fujian Jinhua Integrated Circuit Co, ., Ltd, ., Jinjiang, Quanzhou, Fujian
Keywords:R2R;manufacturing;control;circuit design;virtual metrology
Issue 3, 2021 | PDF
Research Article
Published: Sept. 18, 2021
Abstract: This paper presents an innovative R2R (run to run) control strategy. This novel approach has made use of circuit design structure through virtually put up the structure before reach the actual stru...