TY  - JOUR
Yu Ding; Yongfeng Cao; Xin Luo; Enming Shang; Shaojian Hu; Shoumian Chen; Yuhang ZhaoT1  - A Device Design for 5 nm Logic FinFET Technology
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/03/30
UR  - http://www.jommpublish.org/p/183/50/
L1  - http://www.jommpublish.org/jomm_data/publish/70/35/03/2603324085B4D5C54C25AF2AF4/10.33079.jomm.20030105.pdf
DO  - 10.33079/jomm.20030105
ER  -