TY  - JOUR
Liang Zhu; Barry Ma; Lin Shen; Kevin BeaudetteT1  - A Study of 2D Assist Feature Placement
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/03/30
UR  - http://www.jommpublish.org/p/183/49/
L1  - http://www.jommpublish.org/jomm_data/publish/59/6C/4A/D8C8A347879746611FC1BA587F/10.33079.jomm.20030104.pdf
DO  - 10.33079/jomm.20030104
ER  -