@Article{jomm.20030105,
AUTHOR = {Yu Ding; Yongfeng Cao; Xin Luo; Enming Shang; Shaojian Hu; Shoumian Chen; Yuhang Zhao},
TITLE = {A Device Design for 5 nm Logic FinFET Technology},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030105},
URL = {http://www.jommpublish.org/p/183/50/},
DOI = {10.33079/jomm.20030105}
}