@Article{jomm.19020403,
AUTHOR = {Sicong Wang; Jian Mi; Abhishek Vikram; Gao Xu; Guojie Chen; Liming Zhang; Pan Liu},
TITLE = {Novel Pattern-Centric Solution for Xtacking<sup>TM</sup> AFM Metrology},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020403},
URL = {http://www.jommpublish.org/p/183/39/},
DOI = {10.33079/jomm.19020403}
}