@Article{jomm.19020103,
AUTHOR = {Du Zhang; Yu-Hao Tsai; Hojin Kim; Mingmei Wang},
TITLE = {Nitridation-Etch of Silicon Oxide in Fluorocarbon/Nitrogen Plasma: A Computational Study},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020103},
URL = {http://www.jommpublish.org/p/183/24/},
DOI = {10.33079/jomm.19020103}
}