@Article{jomm.18010201,
AUTHOR = {Man Zhang; Qiling Deng; Hui Pang; Lifang Shi; Axiu Cao},
TITLE = {Preparation of Double-sided Nanostructure Based on Soft-nanoimprinting Lithography},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010201},
URL = {http://www.jommpublish.org/p/183/17/},
DOI = {10.33079/jomm.18010201}
}